Island Coalescence during Film Growth: An Underestimated Limitation of Cu ALD
Hagen, Dirk J. Connolly, James Povey, Ian M. Rushworth, Simon Pemble, Martyn E.
Hagen, Dirk J.
Connolly, James
Povey, Ian M.
Rushworth, Simon
Pemble, Martyn E.
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2017-05-31
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Advanced Materials Interfaces, volume 4, issue 18, page 1700274
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Wiley
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article
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From Crossref via Jisc Publications Router.
Version: VoR
Funder: Science Foundation Ireland, Grant no: 11/PI/1117, FundRef: 10.13039/501100001602
Funder: Irish Research Council for Science, Engineering and Technology, FundRef: 10.13039/501100001596
Funder: Science Foundation Ireland Strategic Research Cluster Grant entitled
Funder: Functional Oxides and Related Materials for Electronics, Grant no: 07/SRC/I1172
Version: VoR
Funder: Science Foundation Ireland, Grant no: 11/PI/1117, FundRef: 10.13039/501100001602
Funder: Irish Research Council for Science, Engineering and Technology, FundRef: 10.13039/501100001596
Funder: Science Foundation Ireland Strategic Research Cluster Grant entitled
Funder: Functional Oxides and Related Materials for Electronics, Grant no: 07/SRC/I1172